The Interactions of Microhole Sidewall With Plasma induced by Femtosecond Laser Ablation in High-Aspect-Ratio Microholes
Author:
Affiliation:
1. Department of Mechanical, Materials and Aerospace Engineering, Illinois Institute of Technology, Chicago, IL 60616
2. Department of Industrial and Manufacturing Systems Engineering, Kansas State University, Manhattan, KS 66506
Abstract
Publisher
ASME International
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering
Link
http://asmedigitalcollection.asme.org/manufacturingscience/article-pdf/doi/10.1115/1.4005431/5935225/011007_1.pdf
Reference23 articles.
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2. Massive Replication of Polymeric High Aspect Ratio Microstructures Using PDMS Casting;Park;Proc. SPIE
3. Applications of LIGA Technology to Precision Manufacturing of High-Aspect-Ratio Micro-Components and Systems: A Review;Malek;Microelectron. J.
4. Deep Drilling of Metals by Femtosecond Laser Pulses;Kamlage;Appl. Phys. A
5. Laser Drilling of High Aspect Ratio Holes in Copper With Femtosecond, Picosecond and Nanosecond Pulses;Weck;Appl. Phys. A
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1. Reducing plasma shielding effect for improved nanosecond laser drilling of copper with applied direct current;Optics & Laser Technology;2023-08
2. Surface Quality and Material Removal Rate in Fabricating Microtexture on Tungsten Carbide via Femtosecond Laser;Micromachines;2023-05-28
3. Hole taper control in femtosecond pulsed laser drilling of silicon carbide ceramic;Journal of Physics: Conference Series;2022-06-01
4. Magnetic Field Effects on Laser Drilling;Journal of Manufacturing Science and Engineering;2013-11-26
5. A comparative study of the interaction between microhole sidewall and the plasma generated by nanosecond and femtosecond laser ablation of deep microholes;Journal of Manufacturing Processes;2012-08
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