Protectiveness of CVD Al2O3 Films on TiN against High-Temperature Oxidation
Author:
Affiliation:
1. Department of Materials Science and Processing, Faculty of Engineering, Osaka University
2. Graduate Student, Osaka University
Publisher
Japan Institute of Metals
Subject
General Engineering
Link
https://www.jstage.jst.go.jp/article/matertrans1989/31/5/31_5_396/_pdf
Reference7 articles.
1. 1) S. Okamoto: Jitsumu Hyoumen Gijyutsu, 32 (1985), 130.
2. 2) S. Takasu and K. Shibuki: Thin Solid Films, 127 (1985), 283.
3. 3) S. Taniguchi, T. Shibata and Y. Horikawa: Boshoku Gijutsu, 37 (1988), 745.
4. 4) S. Taniguchi, T. Shibata and A. Okada: Mater. Trans., JIM, 30 (1989), 765.
5. 5) C. S. Park, J. G. Kim and J. S. Chun: J. Vac. Sci. Technol, 1 (1983), 1820.
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Microwave plasma enhanced CVD of aluminum oxide films: Influence of the deposition parameter on the films characteristics;Le Journal de Physique IV;2001-08
2. Alumina Coatings Applied via Combustion Chemical Vapor Deposition and Their Effects on the Oxidation of a Ni‐Base Chromia Former;Journal of The Electrochemical Society;1998-11-01
3. Chemical vapour deposition of Al2O3 on TiO;Thin Solid Films;1995-07
4. The effect of reactively-sputtered alumina films on the oxidation resistance of CoCrAlY coatings;Le Journal de Physique IV;1993-12
5. Protectiveness of a CVD-Al2O3 Film on TiAl Intermetallic Compound against High-Temperature Oxidation;Materials Transactions, JIM;1991
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3