TEM and HRTEM Observations of Microstructural Change of Silicon Single Crystal Scratched under Very Small Loading Forces by AFM-Reference-Cited by-同舟云学术

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TEM and HRTEM Observations of Microstructural Change of Silicon Single Crystal Scratched under Very Small Loading Forces by AFM

Published:2008 Issue:6 Volume:49 Page:1298-1302
ISSN:1345-9678
Container-title:MATERIALS TRANSACTIONS
language:en
Short-container-title:Mater. Trans.

Author:

Takagi Makoto¹,Onodera Kenji²,Matsumuro Akihito¹,Iwata Hiroyuki³,Sasaki Katsuhiro⁴,Saka Hiroyasu⁴

Affiliation:

1. Department of Mechanical Engineering, Aichi Institute of Technology

2. Graduate School, Aichi Institute of Technology

3. Department of Electrical and Electronics Engineering, Aichi Institute of Technology

4. Department of Quantum Engineering, Nagoya University

Publisher

Japan Institute of Metals

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.jstage.jst.go.jp/article/matertrans/49/6/49_MRA2008017/_pdf

Reference13 articles.

1. 1) T. Saito, Y. Doke, Y. Sakaida and Y. Ikuhara: Jpn. J. Appl. Phys. 34 (1995) 3198.

2. 2) R. Kaneko, K. Nonaka and K. Yasuda: J. Vac. Sci. Technol. A6(2) (1988) 363.

3. 3) T. Miyamoto, R. Kaneko and S. Miyake: J. Vac. Sci. Technol. B9 (1991) 1336.

4. 4) B. Bhushan and J. Rua: ASME J. Tribology 116 (1994) 389.

5. 5) X. Li and B. Bhushan: Thin Solid Films 340 (1999) 210.

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