Effects of Atmosphere and Temperature on Microtribology between Silicon Single Crystals-Reference-Cited by-同舟云学术

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Effects of Atmosphere and Temperature on Microtribology between Silicon Single Crystals

Published:2020-09-01 Issue:9 Volume:84 Page:304-309
ISSN:0021-4876
Container-title:Journal of the Japan Institute of Metals and Materials
language:en
Short-container-title:J. Japan Inst. Metals and Materials

Author:

Takagi Makoto¹,Nagae Kosuke²,Kiuchi Ryosuke²,Iwata Hiroyuki³,Saka Hiroyasu⁴

Affiliation:

1. Department of Mechanical Engineering, Faculty of Engineering, Aichi Institute of Technology

2. Graduate School of Engineering, Aichi Institute of Technology

3. Department of Electrical and Electronics Engineering, Faculty of Engineering, Aichi Institute of Technology

4. Research Institute for Industrial Technology, Aichi Institute of Technology

Publisher

Japan Institute of Metals

Subject

Materials Chemistry,Metals and Alloys,Mechanics of Materials,Condensed Matter Physics

Link

https://www.jstage.jst.go.jp/article/jinstmet/84/9/84_J2020014/_pdf

Reference14 articles.

1. 1) L-S. Fan, Y-C. Tai and R.S. Muller: Sens. Actuator. 20(1989) 41-47.

2. 2) T. Miyamoto, R. Kaneko and S. Miyake: J. Vac. Sci. Technol. B 9(1991) 1336-1339.

3. 3) E. Hamada and R. Kaneko: J. Phys. D 25(1992) A53-A56.

4. 4) T. Miyamoto, S. Miyake and R. Kaneko: Wear 162(1993) 733-738.

5. 5) B. Bhushan and V.N. Koinkar: J. Appl. Phys. 75(1994) 5741-5746.

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