(Bi,La)4Ti3O12 as a ferroelectric layer and SrTa2O6 as a buffer layer for metal-ferroelectric-metal-insulator-semiconductor field-effect transistor
Author:
Affiliation:
1. School of Electrical and Computer Engineering, University of Seoul
2. Department of Geo-informatics, University of Seoul
Publisher
Ceramic Society of Japan
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites
Link
http://www.jstage.jst.go.jp/article/jcersj2/117/1369/117_1369_1032/_pdf
Reference10 articles.
1. 1) H. Ishiwara, Device Research Conference Digest 57th Annual, (1999) pp. 6-9.
2. Nonvolatile ferroelectric-gate field-effect transistors using SrBi2Ta2O9/Pt/SrTa2O6/SiON/Si structures
3. 3) J. H. Kim, J. N. Kim, K. H. Park and B. E. Park, Proceedings of the 16th IEEE International Symposium on the Applications of Ferroelectrics, (2007) pp. 65-68.
4. 4) Y. Nakao, T. Nakamura and H. Ishiwara, IEEE Elec. Dev. Lett., 8, 160-162 (1997).
5. Electrical properties of LaAlO3/Si and Sr0.8Bi2.2Ta2O9/LaAlO3/Si structures
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1. Effects of annealing ambient on ferroelectric properties and surface chemistry of sol–gel derived Bi3.25La0.75Ti3O12 thin films;Journal of Materials Science: Materials in Electronics;2013-11-17
2. Recent Progress of Ferroelectric-Gate Field-Effect Transistors and Applications to Nonvolatile Logic and FeNAND Flash Memory;Materials;2010-11-18
3. Fabrication and characterization of sub-0.6-µm ferroelectric-gate field-effect transistors;Semiconductor Science and Technology;2010-10-15
4. Effect of Mn doping on the leakage current and polarization properties in K0.14Na0.86NbO3 ferroelectric single crystals;Journal of the Ceramic Society of Japan;2010
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