Multifunction of Aluminum Nitride Thin Films Deposited on MoSi<sub>2</sub> Substrates-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Multifunction of Aluminum Nitride Thin Films Deposited on MoSi₂ Substrates

Published:1995 Issue:1201 Volume:103 Page:974-976
ISSN:0914-5400
Container-title:Journal of the Ceramic Society of Japan
language:en
Short-container-title:J. Ceram. Soc. Japan

Author:

AKIYAMA Morito¹,NONAKA Kazuhiro¹,SHOBU Kazuhisa¹,WATANABE Tadahiko¹

Affiliation:

1. Kyushu National Industrial Research Institute

Publisher

Ceramic Society of Japan

Subject

Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites

Link

http://www.jstage.jst.go.jp/article/jcersj1988/103/1201/103_1201_974/_pdf

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate;Sensors and Actuators A: Physical;2006-08

2. Temperature Dependence of Piezoelectric Properties of Sputtered Aluminum Nitride on Silicon Substrate;IEEJ Transactions on Sensors and Micromachines;2006

3. Preparation of Highly Oriented Aluminum Nitride Thin Films on Polycrystalline Substrates by Helicon Plasma Sputtering and Annealing;Journal of the American Ceramic Society;2004-12-20

4. Influence of substrate temperature and ion-beam energy on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed-laser deposition;Applied Physics A;2003-08

5. Intense visible light emission from stress-activated ZrO2:Ti;Applied Physics Letters;2002-07-15

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP