A Two-dimensional Theory for Surface Acoustic Wave Propagation in Finite Piezoelectric Solids

Abstract

Surface acoustic waves (Rayleigh waves) are analyzed for semi-infinite anisotropic solids only for essential propagation characteristics like the velocity and decaying parameters, which are important in engineering applications. The limitations of these results are obvious because devices are usually built on a finite piezoelectric substrate with propagation properties different from the analytical model with which the parameters are derived. For an accurate analysis of the dominant mode of surface acoustic wave propagation in plate-like finite piezoelectric solids, a two-dimensional theory has been developed based on the exponential expansion of displacements and electrical potential in the thickness direction, effectively creating a theory similar to popular plate theories of Mindlin, Lee, and others.