A design methodology for linear ultrasonic motors under contact-based operating conditions

Abstract

In this article, a novel design methodology is proposed to optimize actuator configuration for linear ultrasonic motors with respect to a set of performance-based objectives and constraints. The novelty of the methodology lies in the consideration of the dynamic behavior of the stator in its operating environment, where it interacts mechanically with the moving stage and other peripheral components. With the proposed methodology, the actuator output performance parameters are accurately evaluated enabling their use in an objective function for design optimization. The methodology is illustrated via the design of a bimodal linear ultrasonic motor, which is simulated using a finite element model.