Microsystems in Medicine
Author:
Affiliation:
1. Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik
2. Hauptabteilung Versuchstechnik, Karlsruhe, Germany
Abstract
Publisher
SAGE Publications
Subject
Biomedical Engineering,Biomaterials,General Medicine,Medicine (miscellaneous),Bioengineering
Link
http://journals.sagepub.com/doi/pdf/10.1177/039139889802100304
Reference21 articles.
1. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
2. The LIGA technique and its potential for microsystems-a survey
3. Examination of the solubility and the molecular weight distribution of PMMA in view of an optimised resist system in deep etch x-ray lithography
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