A Sapphire Based Fiber Optic Dynamic Pressure Sensor for Harsh Environments: Fabrication and Characterization
Author:
Affiliation:
1. Interdisciplinary Counsulting Corporation
2. University of Florida
Publisher
American Institute of Aeronautics and Astronautics
Link
http://arc.aiaa.org/doi/pdf/10.2514/6.2011-1098
Reference24 articles.
1. SiC MEMS: opportunities and challenges for applications in harsh environments
2. 6H-SiC pressure sensor operation at 600°C
3. Stabilization of the 3C-SiC/SOI system by an intermediate silicon nitride layer
4. High temperature piezoresistive β-SiC-on-SOI pressure sensor with on chip SiC thermistor
5. Diamond Pressure and Temperature Sensors for High-Pressure High-Temperature Applications
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1. Groove in Sapphire Machined by CO2 Laser Under Water;Lecture Notes in Electrical Engineering;2021
2. A High-Temperature Optical Sapphire Pressure Sensor For Harsh Environments;AIAA Scitech 2019 Forum;2019-01-06
3. Precision in harsh environments;Microsystems & Nanoengineering;2016-10-10
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