Author:
Ziermann R,von Berg J,Obermeier E,Wischmeyer F,Niemann E,Möller H,Eickhoff M,Krötz G
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference7 articles.
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2. G. Kroetz, M. Möller, M. Eickhoff, et al., Heteroepitaxial Growth of 3C-SiC on SOI for Sensor Applications, in: ECSCRM’98, Montpellier, France, Mat. Sci. Eng. B61–62 (1999) 516–521.
3. Characterization of n-type beta -SiC as a piezoresistor
4. J. Strass, M. Eickhoff, G. Kroetz, Transducers’97, Chicago, USA, Vol. 2, pp. 1439-1442.
5. High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines
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