A Simulation Approach to Study the Effect of SiC Polytypism Factor on Sensitivity of Piezoresistive MEMS Pressure Sensor
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s12633-021-01073-9.pdf
Reference37 articles.
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4. Wijesundara MBJ, Azevedo RG (2011) Silicon carbide microsystems for harsh environments. Springer, London
5. Wright NG, Horsfall AB, Vassilevski K (2008) Prospects for SiC electronics and sensors. Mater Today 11:16–21
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