FIB Overview-Reference-Cited by-同舟云学术

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FIB Overview

Published:2019 Issue: Volume: Page:335-350
ISSN:
Container-title:Microelectronics Failure Analysis
language:
Short-container-title:

Author:

Park Chris,Avishai Amir,Pan David,Lewis Brett,Buxbaum Alex

Publisher

ASM International

Reference65 articles.

1. IC failure analysis: Techniques and tools for quality and reliability improvement

2. Advances in Source Technology for Focused Ion Beam Instruments.;Smith;MRS Bulletin,2014

3. High Brightness Inductively Coupled Plasma Source for High Current Focused Ion Beam Applications.;Smith;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena,2006

4. Helium Ion Microscopy

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Rapid high-resolution volumetric imaging via laser ablation delayering and confocal imaging;Scientific Reports;2022-07-19

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