Silicon-on-insulator (SOI) by bonding and ETCH-back-Reference-Cited by-同舟云学术

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Silicon-on-insulator (SOI) by bonding and ETCH-back

Published:1985 Issue: Volume: Page:
ISSN:
Container-title:1985 International Electron Devices Meeting
language:
Short-container-title:

Author:

Lasky J.B.,Stiffler S.R.,White F.R.,Abernathey J.R.

Publisher

IRE

Link

http://xplorestaging.ieee.org/ielx5/9951/31947/01485617.pdf?arnumber=1485617

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