A piezo-resistive resonant MEMS amplifier-Reference-Cited by-同舟云学术

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A piezo-resistive resonant MEMS amplifier

Published:2008-12 Issue: Volume: Page:
ISSN:
Container-title:2008 IEEE International Electron Devices Meeting
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Author:

van Beek J.T.M.,Phan K.L.,Verheijden G.J.A.M.,Koops G.E.J.,van der Avoort C.,van Wingerden J.,Badaroglu D. Ernur,Bontemps J.J.M.,Puers R.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/4786613/4796592/04796782.pdf?arnumber=4796782

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review;Journal of Robotics and Mechatronics;2020-04-20

3. Performance Analysis of Microelectromechanical System Based Displacement Amplification Mechanism;Iranian Journal of Science and Technology, Transactions of Mechanical Engineering;2018-06-27

4. A Piezo-resistive, Temperature Compensated, MEMS-Based Frequency Synthesizer;Frequency References, Power Management for SoC, and Smart Wireless Interfaces;2013-08-01

5. A 230MHz CMOS-MEMS bulk acoustic wave resonator;Microelectronic Engineering;2012-10

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