Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review-Reference-Cited by-同舟云学术

Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review

Published:2020-04-20 Issue:2 Volume:32 Page:281-288
ISSN:1883-8049
Container-title:Journal of Robotics and Mechatronics
language:en
Short-container-title:J. Robot. Mechatron.

Author:

Faudzi Ahmad Athif Mohd,Sabzehmeidani Yaser,Suzumori Koichi, , ,

Abstract

This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection of founding new polymers and composites such as silicon and micro manufacturing technologies performing micro-machining and micro-assembly brings about remarkable growth of application and efficacy of MEMS devices. MEMS indicated huge improvement in size reduction, higher reliability, multi-functionality, customized design, and power usage. Demonstration of various devices and technologies utilized in robotics and industrial applications are illustrated in this article along with the use and the role of silicon in the development of the sensors. Some future trends and its perspectives are also discussed.

Publisher

Fuji Technology Press Ltd.

Subject

Electrical and Electronic Engineering,General Computer Science

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