Author:
Saguin Nongawendé S.Gloria,Maulik Granthana,Cao Xuejiao,Luo Xuan,Nag Anindya,Gao Jingrong,Deng Shanggui,Wong Jonathan W.C.
Reference193 articles.
1. Handbook of Silicon Based MEMS Materials and Technologies;Tilli,2020
2. Design and applications of MEMS flow sensors: a review;Ejeian;Sens. Actuators A: Phys.,2019
3. Processing technology and development of silicon MEMS;Yongqing;Micron Technol.,2010
4. Gyroidal graphene/porous silicon array for exciting optical Tamm state as optical sensor;Zaky;Sci. Rep.,2021
5. Open source silicon microprobes for high throughput neural recording;Yang;J. Neural Eng.,2020