Author:
Ferrer Eloi Marigó,Muñoz-Gamarra J.L.,Giner J.,Uranga A.,Barniol N.
Funder
Spanish MINECO and European FEDER
Generalitat de Catalunya
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference15 articles.
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4. A 12 MHz micromechanical bulk acoustic mode oscillator
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