Metal-Alloy Cu Surface Passivation Leads to High Quality Fine-Pitch Bump-Less Cu-Cu Bonding for 3D IC and Heterogeneous Integration Applications
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Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/8415930/8429093/08429750.pdf?arnumber=8429750
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
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3. Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding;IEEE Transactions on Semiconductor Manufacturing;2022-11
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