Tunable low-loss silicon nitride integrated circuits

Author:

Baburin A.S.1,Lotkov E.S.1,Sergeev E.V.1,Andronic M.2,Baklykov D. A.1,Stukalova V. E.1,Buzaverov K. A.1,Avdeev S.S1,Ryzhikov I.A.2,Dyakonov I.V.3,Skryabin N.3,Saygin M. Yu.3,Kulik S.P.3,Rodionov I.A.1

Affiliation:

1. Dukhov Automatics Research Institute, Federal State Unitary Enterprise, (VNIIA),Moscow,Russia,127055

2. Bauman Moscow State Technical University,FMN Laboratory,Moscow,Russia,105005

3. Quantum Technology Centre MSU,Moscow,Russia,119234

Funder

FMN Laboratory, FMNS REC

Publisher

IEEE

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