Automated Defect Inspection in Reverse Engineering of Integrated Circuits
Author:
Affiliation:
1. Technical University of Munich,Germany
2. Infineon Technologies AG,Munich,Germany
Funder
Electronic Components and Systems for European Leadership
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9706406/9706408/09707067.pdf?arnumber=9707067
Reference36 articles.
1. Histogram-based Auto Segmentation: A Novel Approach to Segmenting Integrated Circuit Structures from SEM Images;wilson,2020
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4. The state-of-the-art in semiconductor reverse engineering
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