An Assessment of Sample Preparation Challenges in 3D Stacked Integrated Circuit Devices for Post-Silicon Verification and Validation

Author:

Padro Noah1,Patel Yash1,Scholl Jon1,Kelley John1,Waite Adam R.1,Sale Matt2,Kimura Adam1

Affiliation:

1. Battelle Memorial Institute

2. Air Force Research Lab

Publisher

IEEE

Reference19 articles.

1. Uniform delayering of copper metallization

2. Preparation, Imaging, and Design Extraction of the Front-End-of-Line and Middle-of-Line in a 14 nm Node FinFET Device

3. Impacts of Substrate Thinning on FPGA Performance and Reliability;leonhardt;Proceedings of the ISTFA 2021 ISTFA 2021 Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis,2021

4. Emerging monolithic 3D integration: Opportunities and challenges from the computer system perspective;yuanqing;Integration,2022

5. A Sample Preparation Workflow for Delayering a 45 nm Node Serial Peripheral Interface (SPI);patel;Electronic Device Failure Analysis(EDFA) Magazaine,2021

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