A Time-Dependent Collisional Sheath Model for Dual-Frequency Capacitively Coupled RF Plasma-Reference-Cited by-同舟云学术

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A Time-Dependent Collisional Sheath Model for Dual-Frequency Capacitively Coupled RF Plasma

Published:2013-01 Issue:1 Volume:41 Page:17-23
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Rahman M. T.,Dewan M. N. A.,Ahmed A.,Chowdhury M. R. H.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx5/27/6403593/06374690.pdf?arnumber=6374690

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Time-Dependent Model of Pulse-Modulated Dual Radio Frequency Capacitively Coupled Plasma Sheath;Plasma Physics Reports;2021-10

2. A time-dependent model of pulse-driven radio frequency capacitively coupled collisional plasma sheath;Physics of Plasmas;2017-01

3. The electric field in capacitively coupled RF discharges: a smooth step model that includes thermal and dynamic effects;Plasma Sources Science and Technology;2015-10-08

4. Analytical Determination of Collisionless Sheath Properties for Triple Frequency Capacitively Coupled Plasma;Plasma Science and Technology;2015-02

5. Analytical Determination of Collisional Sheath Properties for Triple Frequency Capacitively Coupled Plasma;IEEE Transactions on Plasma Science;2014-03

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