The electric field in capacitively coupled RF discharges: a smooth step model that includes thermal and dynamic effects
Author:
Funder
Deutsche Forschungsgemeinschaft (DFG)
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/24/i=6/a=064002/pdf
Reference24 articles.
1. Principles of Plasma Discharges and Materials Processing
2. The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas
3. Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure microplasmas
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1. Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges;Plasma Sources Science and Technology;2023-08-01
2. Validation of the smooth step model by particle-in-cell/Monte Carlo collisions simulations;Plasma Sources Science and Technology;2022-04-01
3. Simulation and modeling of radio-frequency atmospheric pressure plasmas in the non-neutral regime;Plasma Sources Science and Technology;2022-04-01
4. Electron heating mode transitions in radio-frequency driven micro atmospheric pressure plasma jets in He/O2: a fluid dynamics approach;Journal of Physics D: Applied Physics;2021-04-27
5. Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure;Plasma Sources Science and Technology;2020-08-01
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