A Modulation-Defined RF Micro-Acoustic Delay Line based on ScAlN MEMS Resonators for Self-Interference Cancellation
Author:
Affiliation:
1. Northeastern University,ECE,USA
2. Columbia University,EE,USA
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10187888/10187785/10188196.pdf?arnumber=10188196
Reference18 articles.
1. Matlab MEMS Resonator Fitting Script;michetti,0
2. Tunable RF SAW/BAW filters: Dream or reality?
3. ScAlN Lamb wave resonator in GHz range released by XeF2 etching
4. Characteristics of AlN Lamb wave resonators with various bottom electrode configurations;lin;2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings,2011
5. Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication
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