ScAlN Lamb wave resonator in GHz range released by XeF<inf>2</inf> etching-Reference-Cited by-同舟云学术

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ScAlN Lamb wave resonator in GHz range released by XeF2 etching

Published:2013-07 Issue: Volume: Page:
ISSN:
Container-title:2013 IEEE International Ultrasonics Symposium (IUS)
language:
Short-container-title:

Author:

Konno Akira,Sumisaka Masahiro,Teshigahara Akihiko,Kano Kazuhiko,Hashimo Ken-ya,Hirano Hideki,Esashi Masayoshi,Kadota Michio,Tanaka Shuji

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6708499/6724747/06725020.pdf?arnumber=6725020

Cited by 49 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. 6–20 GHz 30% ScAlN Lateral Field-Excited Cross-Sectional Lamé Mode Resonators for Future Mobile RF Front Ends;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10

3. Micromachined piezoelectric Lamb wave resonators: a review;Journal of Micromechanics and Microengineering;2023-09-22

4. A One-port Thermal-conductivity-compensated A0 Mode Al_0.8Sc_0.2N Lamb Wave Resonator Based on SOI Substrate;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

5. Piezoelectric Nanocavity Interface for Strong Coupling between a Superconducting Circuit, Phonon, and Spin;Physical Review Applied;2023-06-15

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