A One-port Thermal-conductivity-compensated A0 Mode Al<sub>0.8</sub>Sc<sub>0.2</sub>N Lamb Wave Resonator Based on SOI Substrate-Reference-Cited by-同舟云学术

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A One-port Thermal-conductivity-compensated A0 Mode Al_0.8Sc_0.2N Lamb Wave Resonator Based on SOI Substrate

Published:2023-09-03 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE International Ultrasonics Symposium (IUS)
language:
Short-container-title:

Author:

Lu Xianzheng¹,Lou Liang²,Ren Hao¹

Affiliation:

1. ShanghaiTech University,School of Information Science and Technology,Shanghai,China,201200

2. Shanghai Industrial µTechnology Research Institute,Shanghai,China,201899

Funder

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10306337/10306342/10306662.pdf?arnumber=10306662

Reference21 articles.

1. Micromachined piezoelectric Lamb wave resonators: a review

2. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

3. ScAlN Lamb wave resonator in GHz range released by XeF2 etching

4. High Figure-of-Merit Lamb Wave Resonators Based on Al0.7Sc0.3N Thin Film

5. Scandium-Doped Aluminum Nitride for Acoustic Wave Resonators, Filters, and Ferroelectric Memory Applications

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