Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication
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Publisher
IEEE
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http://xplorestaging.ieee.org/ielx7/8075004/8088780/08088958.pdf?arnumber=8088958
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. AlYN Thin Films with High Y Content: Microstructure and Performance;physica status solidi (RRL) – Rapid Research Letters;2023-07-21
2. A Modulation-Defined RF Micro-Acoustic Delay Line based on ScAlN MEMS Resonators for Self-Interference Cancellation;2023 IEEE/MTT-S International Microwave Symposium - IMS 2023;2023-06-11
3. Fabrication and characterization of hybrid bulk and surface acoustic wave resonators with Ag/patterned-AlN/Mo/diamond/Si layered structure;Diamond and Related Materials;2023-04
4. Thin film bulk acoustic resonators based on c-axis tilted yttrium-doped AlN for Viscosity sensors;2022 19th International Multi-Conference on Systems, Signals & Devices (SSD);2022-05-06
5. Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N 11 2 ¯ 0 thin films;Applied Physics Letters;2020-03-09
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