An Electromagnetic-Piezoelectric Hybrid Actuated Nanopositioner for Atomic Force Microscopy-Reference-Cited by-同舟云学术

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An Electromagnetic-Piezoelectric Hybrid Actuated Nanopositioner for Atomic Force Microscopy

Published:2024 Issue: Volume:73 Page:1-13
ISSN:0018-9456
Container-title:IEEE Transactions on Instrumentation and Measurement
language:
Short-container-title:IEEE Trans. Instrum. Meas.

Author:

Tan Lingwen¹^ORCID,Wang Xiangyuan¹^ORCID,Yu Qi¹^ORCID,Yu Bocheng²^ORCID,Meng Yixuan¹^ORCID,Li Linlin¹^ORCID,Zhang Xinquan¹^ORCID,Zhu LiMin¹^ORCID

Affiliation:

1. State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China

2. State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, P. R. China

Funder

National Key Research and Development Program

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/19/10367905/10477466.pdf?arnumber=10477466

Reference46 articles.

1. Atomic Force Microscope

2. High-Speed AFM Imaging of Nanopositioning Stages Using H$_{\infty }$ and Iterative Learning Control

3. Quantification of the Microrheology of Living Cells Using Multi-Frequency Magnetic Force Modulation Atomic Force Microscopy

4. Design and Control of a Dual-Probe Atomic Force Microscope

5. Scanning probe microscopy

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1. Surrogate-model-based dwell time optimization for atmospheric pressure plasma jet finishing;International Journal of Mechanical Sciences;2024-11

2. An XYZ parallel nanopositioning stage with hybrid damping;Sensors and Actuators A: Physical;2024-10

3. Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey;International Journal of Extreme Manufacturing;2024-09-12

4. Serial-Kinematic Hybrid Electromagnetic-Piezoelectric AFM Scanner for High-Throughput Raster Scanning;IEEE Transactions on Industrial Electronics;2024

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