Integrated Scandium-Doped Aluminum Nitride Microring Resonators on 8-Inch Silicon Wafers
Author:
Affiliation:
1. School of Microelectronics, Shanghai University,Shanghai,P. R. China
Funder
National Science Foundation (NSF)
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10368381/10368607/10368996.pdf?arnumber=10368996
Reference22 articles.
1. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
2. AlScN‐on‐SiC Thin Film Micromachined Resonant Transducers Operating in High‐Temperature Environment up to 600 °C
3. AlScN-based MEMS magnetoelectric sensor
4. Over 12% of Coupling Coefficient Demonstrated by 3GHz Sc0.12Al0.88N Based Laterally Coupled Alternating Thickness (LCAT) Mode Resonators
5. High $k_{t}^{2}\cdot Q$ Waveguide-Based ScAlN-on-Si UHF and SHF Resonators
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Demonstration of acousto-optical modulation based on a thin-film AlScN photonic platform;Photonics Research;2024-05-17
2. Scandium-doped aluminum nitride photonic integration platform;Integrated Optics: Devices, Materials, and Technologies XXVIII;2024-03-12
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