AlScN-based MEMS magnetoelectric sensor
Author:
Affiliation:
1. Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstrasse 1, 25524 Itzehoe, Germany
2. Institute for Material Science, Kiel University, Kaiserstasse 2, 24143 Kiel, Germany
Funder
German Research Foundation
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/5.0022636
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