Author:
Kuang Jian,Ye Junjie,Young Evangeline F.Y.
Cited by
25 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Multiple patterning via layout decomposition method for directed self-assembly lithography;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-12-19
2. Enhanced and Efficient Guiding Template Design for Lamellar DSA With Graph Monomorphism;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2023-11
3. LayouTransformer;Proceedings of the 41st IEEE/ACM International Conference on Computer-Aided Design;2022-10-30
4. A Via/Contact Layout Decomposition Method for Directed Self-Assembly Based on Local Optimization;2022 International Workshop on Advanced Patterning Solutions (IWAPS);2022-10-21
5. Novel Guiding Template and Mask Assignment for DSA-MP Hybrid Lithography Using Multiple BCP Materials;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2021-09