Modeling Electrostatic MEMS Actuator
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9665417/9665446/09665561.pdf?arnumber=9665561
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1. Theory and Experiments of Angular Vertical Comb-Drive Actuators for Scanning Micromirrors
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3. Closed-loop control of gimbal-less MEMS mirrors for increased bandwidth in LiDAR applications;milanovi?;Proc SPIE 10191 Laser Radar Technology and Applications XXII,2017
4. Adaptive Prefilter Design for Control of Quasistatic Microscanners
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Extended Higher-Order Elements with Frequency-Doubled Parameters: The Hysteresis Loops Are Always of Type II;Sensors;2023-08-15
2. Position Sensing of Electrostatic MEMS Actuator;2022 29th IEEE International Conference on Electronics, Circuits and Systems (ICECS);2022-10-24
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