Adaptive Prefilter Design for Control of Quasistatic Microscanners

Author:

Janschek Klaus,Sandner Thilo,Schroedter Richard,Roth Matthias

Publisher

Elsevier BV

Subject

General Medicine

Reference25 articles.

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3. Command-Shaping Techniques for Electrostatic MEMS Actuation: Analysis and Simulation;Chen;Journal of Microelectromechanical Systems,2007

4. A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems;Ferreira;IEEE Transactions on Systems, Man, and Cybernetics—Part C: Applications and Reviews,2011

5. Damping of structural vibrations with piezoelectric materials and passive electrical networks;Hagood;Journal of Sound and Vibration,1991

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2. Nested Closed-Loop Control of Quasi-Static MEMS Scanners With Large Dynamic Range;IEEE Transactions on Industrial Electronics;2023-04

3. Iterative Learning Control for Quasi-Static MEMS Mirror with Switching Operation;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

4. Piezoresistive Versus Piezoelectric Position Sensing in MEMS Micromirrors: A Noise and Temperature Drift Comparison;IEEE Sensors Letters;2022-03

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