Fabrication of a Flexible Film Bulk Acoustic Resonator for Wireless Sensor Networks
Author:
Affiliation:
1. Dipartimento di Ingegneria Elettrica e dell'Informazione Politecnico di Bari,Bari,BA,Italy
2. Center for biomolecular nanotechnolgy, Istituto Italiano di Tecnologia Arnesano (LE),Italy
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9823395/9825496/09825594.pdf?arnumber=9825594
Reference14 articles.
1. Detection and Discrimination of Volatile Organic Compounds using a Single Film Bulk Acoustic Wave Resonator with Temperature Modulation as a Multiparameter Virtual Sensor Array
2. High-performance FBAR humidity sensor based on the PI film as the multifunctional layer
3. Fully integrated FBAR sensor matrix for mass detection
4. Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer
5. Wearable piezoelectric mass sensor based on pH sensitive hydrogels for sweat pH monitoring
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1. Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator;Sensors;2023-02-02
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