Q-boosting of metal MEMS resonators via localized anneal-induced tensile stress

Author:

Ozgurluk Alper,Liu Ruonan,Nguyen Clark T.-C.

Publisher

IEEE

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Geometrically engineered mass sensing CMOS-MEMS resonators for temperature compensation via folded anchors;Sensors and Actuators A: Physical;2024-08

2. Q-Boosting Of Composite CMOS-MEMS Resonators By AC Current Low-Temperature Annealing;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

3. Ferrite-Rod Antenna Driven Wireless Resoswitch Receiver;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

4. A CMOS-MEMS Beam Resonator with Q > 10,000;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

5. Single-Digit-Nanometer Capacitive-Gap Transduced Micromechanical Disk Resonators;2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS);2020-01

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