Single-Digit-Nanometer Capacitive-Gap Transduced Micromechanical Disk Resonators

Author:

Ozgurluk Alper,Peleaux Kieran,Nguyen Clark T.-C.

Publisher

IEEE

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Temperature Compensation Using an In-Situ Gap-Based Temperature Sensor;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

2. A New Finding on Nonlinear Damping and Stiffness of Flexural Mode Capacitive MEMS Resonators;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

3. Design and Applications of Integrated Transducers in Commercial CMOS Technology;Frontiers in Mechanical Engineering;2022-06-14

4. A 122 dBΩ 370 MHz CMOS Transimpedance Amplifier for 20 MHz MEMS Resonator;2021 IEEE International Workshop on Electromagnetics: Applications and Student Innovation Competition (iWEM);2021-11-28

5. A $118\ \text{dB}\Omega$ 190 MHz CMOS Transimpedance Amplifier Using Phase Compensator for MEMS Beam Oscillator;2021 IEEE Asia Pacific Conference on Circuit and Systems (APCCAS);2021-11-22

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