Optimally Scheduling Dual-Arm Multi-Cluster Tools to Process Two Wafer Types-Reference-Cited by-同舟云学术

Optimally Scheduling Dual-Arm Multi-Cluster Tools to Process Two Wafer Types

Published:2022-07 Issue:3 Volume:7 Page:5920-5927
ISSN:2377-3766
Container-title:IEEE Robotics and Automation Letters
language:
Short-container-title:IEEE Robot. Autom. Lett.

Author:

Zhu QingHua¹^ORCID,Wang GengHong¹,Hou Yan¹,Wu NaiQi²^ORCID,Qiao Yan²^ORCID

Affiliation:

1. School of Computer Science and Technology, Guangdong University of Technology, Guangzhou, China

2. Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Taipa, Macao, China

Funder

National Natural Science Foundation of China

Natural Science Foundation of Guangdong Province

Science and Technology Development Fund

Macau SAR

Research Fund of Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Artificial Intelligence,Control and Optimization,Computer Science Applications,Computer Vision and Pattern Recognition,Mechanical Engineering,Human-Computer Interaction,Biomedical Engineering,Control and Systems Engineering

Link

http://xplorestaging.ieee.org/ielx7/7083369/9750005/09729521.pdf?arnumber=9729521

Reference41 articles.

1. An Efficient Deadlock Prevention Policy for Noncyclic Scheduling of Multicluster Tools

2. A new deadlock prevention policy for multi-cluster tools with dual path

3. Cyclic Scheduling of Multi-Cluster Tools Based on Mixed Integer Programming

4. Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down

5. Optimal Scheduling of Multicluster Tools With Constant Robot Moving Times, Part I: Two-Cluster Analysis

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