Toward Design and Implementation of Intelligent Manufacturing in Semiconductor Production Industry with Wafer Chamber Faults

Author:

Menexis Antonios N.,Koumboulis Fotis N.,Fragkoulis Dimitrios G.,Kouvakas Nikolaos D.

Publisher

Springer Nature Singapore

Reference28 articles.

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3. Dai W, Vyatkin V (2010) Redesign distributed IEC 61131–3 PLC system in IEC 61499 function blocks. In: 2010 IEEE 15th conference on emerging technologies & factory automation (ETFA 2010), Bilbao, Spain, pp 1–8

4. EU Parliament homepage (2023) https://www.europarl.europa.eu/news/en/press-room/20230707IPR02418/semiconductors-meps-adopt-legislation-to-boost-eu-chips-industry. Accessed on 14 July 2023

5. Fan S-KS, Hsu C-Y, Tsai D-M, He F, Cheng C-C (2020) Data-driven approach for fault detection and diagnostic in semiconductor manufacturing. IEEE Trans Autom Sci Eng 17(4):1925–1936

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