Scheduling of Time-Constrained Single-Arm Cluster Tools with Two-Space Process Modules in Semiconductor Manufacturing-Reference-Cited by-同舟云学术

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Scheduling of Time-Constrained Single-Arm Cluster Tools with Two-Space Process Modules in Semiconductor Manufacturing

Published:2024-07 Issue:7 Volume:9 Page:6352-6359
ISSN:2377-3766
Container-title:IEEE Robotics and Automation Letters
language:
Short-container-title:IEEE Robot. Autom. Lett.

Author:

Zou ChengYu¹^ORCID,Wang GengHong¹^ORCID,Gu Lei¹^ORCID,Li Jie²^ORCID,Wu NaiQi¹^ORCID,Qiao Yan¹^ORCID

Affiliation:

1. Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macao, China

2. IKAS Industries Technology (Suzhou) Company Ltd., Suzhou, China

Funder

Science and Technology development

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/7083369/10534628/10517370.pdf?arnumber=10517370

Reference30 articles.

1. Scheduling of multi-slot cluster tools with wafer delay constraints;Jee,2021

2. A review of scheduling theory and methods for semiconductor manufacturing cluster tools

3. A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints

4. A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis

5. Scheduling analysis of time-constrained dual-armed cluster tools

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