A review of scheduling theory and methods for semiconductor manufacturing cluster tools
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Publisher
IEEE
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http://xplorestaging.ieee.org/ielx5/4712635/4736042/04736310.pdf?arnumber=4736310
Cited by 84 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Scheduling of Time-Constrained Single-Arm Cluster Tools with Two-Space Process Modules in Semiconductor Manufacturing;IEEE Robotics and Automation Letters;2024-07
2. Scheduling Cluster Tools for Concurrent Processing: Deep Reinforcement Learning With Adaptive Search;IEEE Transactions on Automation Science and Engineering;2024
3. A Novel Mixed Integer Programming Model With Precedence Relation-Based Decision Variables for Non-Cyclic Scheduling of Cluster Tools;IEEE Transactions on Automation Science and Engineering;2024
4. Scheduling a Single-ARM Multi-Cluster Tool with a Condition-Based Cleaning Operation;IEEE/CAA Journal of Automatica Sinica;2023-10
5. Look-ahead based reinforcement learning for robotic flow shop scheduling;Journal of Manufacturing Systems;2023-06
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