Atomic Defects Profiling and Reliability of Amorphous Al<sub>2</sub>O<sub>3</sub> Metal–Insulator

Atomic Defects Profiling and Reliability of Amorphous Al₂O₃ Metal–Insulator–Metal Stacks

Published:2022-07 Issue:7 Volume:69 Page:3884-3891
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Torraca P. La¹^ORCID,Caruso F.²^ORCID,Padovani A.³^ORCID,Tallarida G.²^ORCID,Spiga S.²^ORCID,Larcher L.²^ORCID

Affiliation:

1. Department of Sciences and Methods for Engineering, University of Modena and Reggio Emilia, Reggio Emilia, Italy

2. CNR-Institute for Microelectronics and Microsystems (CNR-IMM), Unit of Agrate Brianza, Agrate Brianza, Italy

3. Applied Materials-MDLx Italy Research and Development, Reggio Emilia, Italy

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/16/9802454/09774429.pdf?arnumber=9774429

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