Impact of Process-Induced Inclined Sidewalls on Gate-Induced Drain Leakage (GIDL) Current of Nanowire GAA MOSFETs

Author:

Maniyar Ashraf1ORCID,Srinivas P. S. T. N.1ORCID,Tiwari Pramod Kumar1ORCID,Chang-Liao Kuei-Shu2ORCID

Affiliation:

1. Department of Electrical Engineering, Indian Institute of Technology Patna, Patna, Bihar, India

2. Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan

Funder

Department of Science and Technology (DST) of India and the Ministry of Science and Technology (MOST) of Taiwan, through the Program of Cooperation between India and Taiwan

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Impact of Process-Induced Inclined Sidewalls On Small Signal Parameters of Silicon Nanowire GAA MOSFET;TENCON 2023 - 2023 IEEE Region 10 Conference (TENCON);2023-10-31

2. Multivalued DRAM;Journal of Electronic Materials;2023-04-19

3. Assessment of hot carrier stress induced threshold voltage shift in gate-all-around MOSFETs;2022 IEEE 19th India Council International Conference (INDICON);2022-11-24

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