A Transfer Function Approach to Shock Duration Compensation for Laboratory Evaluation of Ultra-High-G Vacuum-Packaged MEMS Accelerometers-Reference-Cited by-同舟云学术

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A Transfer Function Approach to Shock Duration Compensation for Laboratory Evaluation of Ultra-High-G Vacuum-Packaged MEMS Accelerometers

Published:2019-01 Issue: Volume: Page:
ISSN:
Container-title:2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Xu Kaisi,Zhu Ningli,Jiang Fushuai,Zhang Wei,Hao Yilong

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8863068/8870611/08870797.pdf?arnumber=8870797

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Reliability of MEMS inertial devices in mechanical and thermal environments: A review;Heliyon;2024-03

2. Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range;Micromachines;2024-01-30

3. Mechanical Response of MEMS Suspended Inductors under Shock Using the Transfer Matrix Method;Micromachines;2023-06-01

4. An Analytical Model of Transient Response of MEMS under High-G shock for Reliability Assessment;2022 IEEE International Reliability Physics Symposium (IRPS);2022-03

5. Reliability of MEMS in Shock Environments: 2000–2020;Micromachines;2021-10-20

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