Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization-Reference-Cited by-同舟云学术

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Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization

Published:2022-10 Issue:5 Volume:31 Page:753-759
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Wang Xiaoyi¹^ORCID,Lee Yi-Kuen²^ORCID,Xu Wei³^ORCID

Affiliation:

1. School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing, China

2. Department of Mechanical and Aerospace Engineering, The Hong Kong University of Science and Technology, Sai Kung, Hong Kong

3. College of Electronic and Information Engineering, Shenzhen University, Shenzhen, China

Funder

Hong Kong Innovation and Technology Fund

National Natural Science Foundation of China

Open Foundation of the State Key Laboratory of Digital Manufacturing Equipment and Technology

Beijing Institute of Technology Research Fund Program for Young Scholars

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/9906516/09861633.pdf?arnumber=9861633

Reference35 articles.

1. Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

2. Frequency response analysis of an accelerometer based on thermal convection

3. Studies and optimization of the frequency response of a micromachined thermal accelerometer

4. Sensitivity improvement using optimized heater design for dual axis thermal accelerometers

5. Sensitivity Improvement of Micro Thermal Convective Accelerometer with Structure Optimization: Theoretical and Experimental Studies

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Low-Power and Robust Micromachined Thermal Convective Accelerometer;Micromachines;2024-06-29

2. Fabrication and Characterization of a MEMS Thermal Convective Accelerometer on Silicon-in-Glass Substrate;IEEE Sensors Journal;2024-04-01

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