Frequency response analysis of an accelerometer based on thermal convection-Reference-Cited by-同舟云学术

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Frequency response analysis of an accelerometer based on thermal convection

Published:2011-02-17 Issue:3 Volume:21 Page:035017
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Garraud A,Combette P,Pichot F,Courteaud J,Charlot B,Giani A

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Silicon accelerometer based on thermopiles

2. Design of a micromachined thermal accelerometer: thermal simulation and experimental results

3. Effect of gas pressure on the sensitivity of a micromachined thermal accelerometer

4. Thermal simulation and experimental results of a micromachined thermal inclinometer

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization;Journal of Microelectromechanical Systems;2022-10

2. Computational Study on Thermal Motion Sensors That Can Measure Acceleration and Rotation Simultaneously;Sensors;2022-09-07

3. Theoretical Modeling, Numerical Simulations and Experimental Study of Micro Thermal Convective Accelerometers;Journal of Microelectromechanical Systems;2019-10

4. Multi-axis Response of a Thermal Convection-based Accelerometer;Micromachines;2018-06-29

5. A review of micromachined thermal accelerometers;Journal of Micromechanics and Microengineering;2017-11-16

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