An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer-Reference-Cited by-同舟云学术

An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer

Author:

Ma Liangbo¹^ORCID,Wang Jiawei¹,Wang Zheng²,Wang Kunfeng¹^ORCID,Zhai Zhaoyang¹,Cai Pengcheng¹,Xiong Xingyin¹,Zou Xudong¹^ORCID

Affiliation:

1. State Key Laboratory of Transducer Technology, The Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, China

2. Qilu Research Institute and The Aerospace Information Research Institute, Chinese Academy of Sciences, Jinan, China

Funder

Key Research Program of Frontier Science, CAS

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

Reference32 articles.

4. Stiffness-compensated temperature-insensitive micromechanical resonators;hsu;Proc IEEE MEMS,2002

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