Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators-Reference-Cited by-同舟云学术

Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators

Published:2007-10 Issue:7 Volume:102 Page:074903
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Agarwal Manu,Mehta Harsh,Candler Robert N.,Chandorkar Saurabh A.,Kim Bongsang,Hopcroft Matthew A.,Melamud Renata,Bahl Gaurav,Yama Gary,Kenny Thomas W.,Murmann Boris

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2785018

Reference18 articles.

1. Solid-State Sensors, Actuators and Microsystems;Nguyen C. T.-C.,2005

2. Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems

3. Noise in microelectromechanical system resonators

4. IEEE Frequency Control Symposium;Gagnepain J. J.,1981

5. IEEE Frequency Control Symposium;Gagnepain J. J.,1987

Cited by 50 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Phase evolution and control in a synchronized Duffing-type nonlinear micro-oscillator;Mechanical Systems and Signal Processing;2024-10

2. On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation;Journal of Microelectromechanical Systems;2024

3. Probing Linear to Nonlinear Damping in 2D Semiconductor Nanoelectromechanical Resonators toward a Unified Quality Factor Model;Nano Letters;2023-10-03

4. Nonlinear Stiffness and Nonlinear Damping in Atomically Thin MoS₂ Nanomechanical Resonators;Nano Letters;2022-12-08

5. An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer;Journal of Microelectromechanical Systems;2022-12