On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation-Reference-Cited by-同舟云学术

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On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation

Published:2024 Issue: Volume: Page:1-9
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Li Chengxin¹^ORCID,Quan Aojie¹,Zhang Hemin²,Wang Chen¹,Wang Linlin¹^ORCID,Torunbalci Mustafa Mert³^ORCID,Wang Yuan⁴^ORCID,Kraft Michael¹^ORCID

Affiliation:

1. Department of Electrical Engineering, ESAT Research Division Micro-and Nano-Systems (ESAT-MNS), Leuven, Belgium

2. MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi’an, China

3. Broadcom, San Jose, CA, USA

4. Institute of Microelectronics, University of Macau, Macau, China

Funder

Einstein Telescope EMR Site & Technology (E-TEST) of Interreg V-A Euregio Meuse-Rhine (V-A EMR) Project EMRI13

China Scholarship Council

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx8/84/4357932/10651611.pdf?arnumber=10651611

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