Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer

Author:

Li Fangzheng1ORCID,Liu Dandan2ORCID,Gao Le1,Cai Bingyang1,Yang Lujia1ORCID,Wang Yuan3,Zhao Chun4ORCID,Wu Wenjie1ORCID,Tu Liangcheng5ORCID

Affiliation:

1. MOE Key Laboratory of Fundamental, Physical Quantities Measurement, the Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF, and the School of Physics, Huazhong University of Science and Technology, Wuhan, China

2. School of Electronic and Electrical Engineering, Shangqiu Normal University, Shangqiu, China

3. Institute of Microelectronics, University of Macau, Macau, China

4. School of Physics, Engineering and Technology, University of York, Heslington, York, U.K.

5. MOE Key Laboratory of Tianqin Mission, Tianqin Research Center for Gravitational Physics, School of Physics and Astronomy, Frontiers Science Center for Tianqin, Gravitational Wave Research Center of CNSA, Sun Yat-sen University (Zhuhai Campus), Zhuhai, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

High-Quality Development Program of the Ministry of Industry and Information Technology of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

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